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SC28 Monitoring System from Spicer Consulting Now Obtainable

Herzan is excited to announce the latest release from Spicer Consulting: the SC28 monitoring system.

SC28 Monitoring Software

Image Credit: Herzan

The SC28 enables longterm, uninterrupted monitoring of magnetic fields, vibrations, and acoustic noise – as well as temperature and humidity – within the lab and semiconductor fab. This system is intentionally-designed to monitor the environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM), Electron Beam Lithography tools, and SEM-based metrology and inspection tools.

What's In the Box

The SC28 utilizes high-performance sensors and monitoring hardware to deliver a clear and comprehensive understanding of the environment being measured.

SC28 Monitoring Software

Image Credit: Herzan

Monitoring System: SC28/SI AC/DC

Sensors: Sensor SC24/DC+AC and Sensor SC11/AC

Acoustic Microphone: Brüel & Kjær 4190 microphone

Vibration Sensors: Wilcoxon 731A accelerometers (three)

Temperature/Humidity Sensor: Sensor SC28/TH

Unique Features

SC28 Monitoring Software

Image Credit: Herzan

Purposefully Designed: Long term environmental monitoring for electron beam instruments

Complete Environmental Monitoring: continuously measure magnetic fields, floor vibration (X, Y, and Z), acoustic levels at 2kHz, and temperature/humidity at 1Hz or below

Completely Visual: up to 14 different graphs may be displayed simultaneously

Comprehensive Acquisition: Acquires sensor data and logs spectra and charts to date-stamped files

Headless: can run without user interface open




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